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Field-free analytical UHR SEM for materials characterization at the nanoscale

• Uncompromised characterization of all types of materials at the nanoscale

• Ideal for characterization of materials at low beam energies for maximum surface topography

• Excellent imaging of beam-sensitive and non-conductive samples

• Fully automated setup of electron beam – optimal imaging conditions are guaranteed by the In-Flight Beam Tracing?

• Intuitive live SEM navigation on the sample at magnification as low as 2× without the need of an extra optical navigation camera thanks to the Wide Field Optics? design

• Unique In-Beam Multidetector design allowing angle and energy selective BSE detection

• Intuitive software modular platform designed for effortless operation regardless of users’ skill level